A complete methodology for electro-mechanical characterization of a CMOS compatible MEMS technology

Authors
Latorre, L Nouet, P
Citation
L. Latorre et P. Nouet, A complete methodology for electro-mechanical characterization of a CMOS compatible MEMS technology, IEICE TR EL, E82C(4), 1999, pp. 582-588
Citations number
17
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEICE TRANSACTIONS ON ELECTRONICS
ISSN journal
09168524 → ACNP
Volume
E82C
Issue
4
Year of publication
1999
Pages
582 - 588
Database
ISI
SICI code
0916-8524(199904)E82C:4<582:ACMFEC>2.0.ZU;2-8
Abstract
In this paper we present a complete methodology for efficient electro-mecha nical characterization of a CMOS compatible MEMS technology. Using an origi nal test structure, the so-called "U-shape cantilever beam," we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanic al relations for the design of Microsystems have also been developed.