Energy filtering transmission electron microscopy using the new JEM-201OFEF

Citation
Y. Tomokiyo et al., Energy filtering transmission electron microscopy using the new JEM-201OFEF, J MICROSC O, 194, 1999, pp. 210-218
Citations number
21
Categorie Soggetti
Multidisciplinary
Journal title
JOURNAL OF MICROSCOPY-OXFORD
ISSN journal
00222720 → ACNP
Volume
194
Year of publication
1999
Part
1
Pages
210 - 218
Database
ISI
SICI code
0022-2720(199904)194:<210:EFTEMU>2.0.ZU;2-M
Abstract
The new JEM-2010FEF electron microscope provides useful techniques based on energy filtering as an omega-type energy filter is integrated into a therm al field-emission 200 kV transmission electron microscope. For example, the zero-loss imaging improves the contrast of high resolution lattice images as well as images of precipitates or lattice defects in alloys. The acquisi tion time for elemental mapping with core-loss electrons is one order in ma gnitude shorter than with energy-dispersive X-ray spectroscopy, The removal of inelastically scattered electrons enables us to observe weal; lines in convergent-beam electron diffraction patterns from a thicker specimen with a probe size 1-2 nm in diameter. A combination of the field emission gun an d sensitive recording media such as an imaging plate and a slow-scan CCD ca mera makes the energy filtering more powerful.