La1-xSrxCoO3-delta (LSCO) films have been deposited on LaAlO3 (LAO), La1-xS
rxGa1-yMgyO3-delta/LaAlO3 (LSGM/LAO) and yittria-stabilized zirconia (YSZ)
substrates by pulsed laser deposition (PLD) for application to thin film so
lid oxide fuel cell cathodes. The optimum conditions for deposition were de
termined for the different substrates in an ambient of 80-310 mTorr oxygen
pressure and at a substrate temperature range of 450 to 750 degrees C. The
films structures were analyzed by XRD, RBS and SEM. Epitaxial LSCO films we
re grown with (110) preferred orientation on YSZ, and with (100) orientatio
n on LAO and LSGM/LAO. The electrical resistivity of the epitaxial LSCO fil
ms ranged from 10(-2) to 10(-4) Ohm cm, depending on the deposition tempera
ture and substrate. The ionic conducting behavior of the LSCO film on YSZ w
as investigated by impedance measurement. (C) 1999 Elsevier Science Limited
. All rights reserved.