Characterization of PZT thin films prepared by a modified sol-gel method

Authors
Matthes, B Tomandl, G Werner, G
Citation
B. Matthes et al., Characterization of PZT thin films prepared by a modified sol-gel method, J EUR CERAM, 19(6-7), 1999, pp. 1387-1389
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
ISSN journal
09552219 → ACNP
Volume
19
Issue
6-7
Year of publication
1999
Pages
1387 - 1389
Database
ISI
SICI code
0955-2219(1999)19:6-7<1387:COPTFP>2.0.ZU;2-5
Abstract
Lead zirconate titanate (PZT) thin films with thicknesses of around 5 mu m were prepared by the deposition a sol slurry. This sol slurry consists of a PZT-sol on acetic acid basis and PZT powder. The sol serves as the dispers ion agent of the powder. Both are identical in composition with molar ratio Zr/Ti of 0.53/0.47. Lead in excess of 5% was used in all samples. This coa ting conditions enhance the possibilities of film preparation. (C) 1999 Els evier Science Limited. All rights reserved.