Characterization of seeded sol-gel lead zirconate titanate thin films

In this paper the electrical properties of PZT (52/48) thin-films derived f rom seeded and unseeded sol-gel precursors are presented. A pure perovskite phase was obtained at lower temperatures, 550 degrees C for 30 min, for fi lm prepared from seeded precursors and deposited on platinum passivated sil icon substrates (Pt/Ti/SiO2/Si). The electrical properties of these films a lso reflect the presence ol absence of seeds in the precursors. Ferroelectr ic hysteresis loops began to be observed for seeded films fired at 500 degr ees C for 30 min, while in the films derived from unseeded precursors ana f ired in the same conditions, linear polarization versus electrical field cu rve is observed. (C) 1999 Elsevier Science Limited. All rights reserved.