A novel integrated thin film capacitor realized by a multilayer ceramic-electrode sandwich structure

In this work a method will be presented to increase the capacitance of an i ntegrated capacitor per chip area using a sandwich multilayer structure, wh ich is successfully employed for ceramic multilayer capacitors used as surf ace mount devices. On a Pt coated Si/SiO2 wafer polycrystalline SrTiO3 film s deposited by a chemical solution deposition (CSD) method and sputter depo sited Pt layers have been alternatingly arranged. Connecting all even Pt el ectrode layers and all odd, respectively, leads to an equivalent circuit of several high permittivity SrTiO3 thin film capacitors in parallel. (C) 199 9 Elsevier Science Limited. All rights reserved.