Generalized conversion from the phase function to the blazed surface-relief profile of diffractive optical elements

The problem of the relation between the phase function and the thin microre lief profile of diffractive optical elements is considered in detail throug h the nonparaxial scalar diffraction theory for the case of a curved substr ate surface and an astigmatic incident beam. Local-plane-wave expansions ar e used to calculate a coefficient of proportionality between microrelief he ight and phase jump as a function of microrelief orientation and of local s lope angles of the incident and the output beams. Nonuniform transition hei ghts between 2 pi-phase zones of the microrelief are calculated. Analytical and numerical data are presented for examples of high-numerical-aperture d iffractive lenses on plane, spherical, or aspherical substrate surfaces. (C ) 1999 Optical Society of America [S0740-3232(99)00405-6].