Femtosecond laser pulse nanolithography using on STM tip

Authors
Lozovik, YE Lisin, DV Ivanov, AI Kompanets, VO Matveets, YA Chekalin, SV Merkulova, SP
Citation
Ye. Lozovik et al., Femtosecond laser pulse nanolithography using on STM tip, LASER PHYS, 9(2), 1999, pp. 564-569
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
LASER PHYSICS
ISSN journal
1054660X → ACNP
Volume
9
Issue
2
Year of publication
1999
Pages
564 - 569
Database
ISI
SICI code
1054-660X(199903/04)9:2<564:FLPNUO>2.0.ZU;2-B
Abstract
The nanolithography technique is proposed and realized experimentally using the local field of femtosecond laser pulses enhanced in a submicron region due to lighting rod effect or to the excitation of local resonances in an STM tip-substrate system. Surface topography analysis in STM mode demonstra tes the controlled surface modification in a suitable regime of intensity p arameters and femtosecond laser pulses focusing in the STM tip region.