The numerical modelling of silicon carbide high power semiconductor devices

Citation
A. Elford et Pa. Mawby, The numerical modelling of silicon carbide high power semiconductor devices, MICROELEC J, 30(6), 1999, pp. 527-534
Citations number
37
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONICS JOURNAL
ISSN journal
00262692 → ACNP
Volume
30
Issue
6
Year of publication
1999
Pages
527 - 534
Database
ISI
SICI code
0026-2692(199906)30:6<527:TNMOSC>2.0.ZU;2-3
Abstract
Over the past decade there was a renewed surge of activity concerning the r esearch and development of the wide bandgap group IV compound semiconductor silicon carbide (SiC). The current research interest in SiC for power elec tronic applications has re-emerged because of the advances made in fundamen tal SIC material and device processing technologies. This article outlines recent SIC power device developments with an emphasis on numerical device m odelling results. This work also presents 1D and 2D numerical modelling res ults for unterminated circular high voltage 4H-SiC Schottky rectifiers. An overview of the current status of SIC high voltage junction termination tec hniques is also mentioned. (C) 1999 Elsevier Science Ltd. All rights reserv ed.