Calibration specimens for determining energy-dispersive X-ray k-factors ofboron, nitrogen, oxygen, and fluorine

We have fabricated amorphous thin-film specimens containing light elements (B, C, N, O, F, and Mg) in addition to silicon, and have measured their com position using electron energy-loss spectroscopy (EELS). The films appear t o be stable during storage in air and during irradiation by an electron bea m, for doses below 10(5) C/cm(2). Used with a transmission electron microsc ope fitted with an energy-dispersive X-ray (EDX) detector, they provide a c onvenient means of determining light-element k-factors for X-ray microanaly sis. For a TEM equipped with an electron energy-loss spectrometer, the spec imens can also be used to check the EELS instrumentation and elemental-quan tification procedures.