Lw. Chang et al., Measurement of absolute displacement by a double-modulation technique based on a Michelson interferometer, APPL OPTICS, 38(13), 1999, pp. 2843-2847
A novel method is presented for of measuring absolute displacement with a s
ynthesized wavelength interferometer. The optical phase of the interferomet
er is simultaneously modulated with a frequency-modulated laser diode and o
ptical path-length difference. The error signal originating from the intens
ity modulation of the source is eliminated by a signal processing circuit.
In addition, a lock-in technique is used to demodulate the envelope of the
interferometric signal. The displacement signal is derived by the self-mixi
ng technique. (C) 1999 Optical Society of America OCIS codes: 120.0120, 120
.3180.