Citation
S. Dey et Sj. Yun, AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition, APPL SURF S, 143(1-4), 1999, pp. 191-200
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332
→ ACNP
Volume
143
Issue
1-4
Year of publication
1999
Pages
191 - 200
Database
ISI
SICI code
0169-4332(199904)143:1-4<191:ASOPCS>2.0.ZU;2-#
Abstract
Polycrystalline CaS thin films were grown on Al2O3 films deposited on Si-wa
fer using the atomic layer deposition (ALD) technique. The surface structur
e of these films was studied by AFM and compared with respective SEM images
. The polycrystalline film surfaces comprise regular shaped crystallites. F
irst report of a possible growth mechanism is presented, on studying the va
riation of morphological features (i.e., roughness and size of crystallites
) with thickness and growth rate. (C) 1999 Elsevier Science B.V. All rights
reserved.