Electrical and optical properties of thin indium tin oxide films produced by pulsed laser ablation in oxygen or rare gas atmospheres

Films of indium tin oxide (ITO) have been produced in different background gases by pulsed laser deposition (PLD). The Films deposited in rare gas atm ospheres on room temperature substrates were metallic, electrically conduct ive, but had poor transmission of visible light. For substrate temperatures at 200 degrees C, the specific resistivity was reduced and the transmissio n of visible light enhanced for all background gases. Films produced in oxy gen turned out to be superior to films deposited in other gases at the same temperature. (C) 1999 Elsevier Science B.V. All rights reserved.