Annealing effect on the electron field emission characteristics of pulsed laser deposited diamond-like carbon films an glass substrates

Citation
Jl. Hsu et al., Annealing effect on the electron field emission characteristics of pulsed laser deposited diamond-like carbon films an glass substrates, APPL SURF S, 142(1-4), 1999, pp. 510-515
Citations number
20
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
APPLIED SURFACE SCIENCE
ISSN journal
01694332 → ACNP
Volume
142
Issue
1-4
Year of publication
1999
Pages
510 - 515
Database
ISI
SICI code
0169-4332(199904)142:1-4<510:AEOTEF>2.0.ZU;2-E
Abstract
The electron field emission properties of the diamond-like carbon (DLC) fil ms prepared by the pulsed laser deposition process were observed to change significantly with the substrate temperature and the laser fluence. Raman s pectroscopic analyses indicated that the substrate: temperature and laser f luence pronouncedly modify the sp(3)-bonds content of the DLC films. Larger proportion of sp(3)-bonds resulted in higher emission current density (J(e )). Post-annealing process lowers the proportion of sp(3)-bonds. The optimu m electron field emission behavior obtained is emission current density (J( e))(DLC) = 480 mu A/cm(2), turn-on field (E-0)(DLC) = 8 V/mu m and effectiv e work function (phi(e))(DLC) = 0.0546 eV. (C) 1999 Elsevier Science B.V. A ll rights reserved.