TiO2 coating by atmospheric pressure MOCVD in a conveyor belt furnace for industrial applications

Authors
Battiston, GA Gerbasi, R Porchia, M Rizzo, L
Citation
Ga. Battiston et al., TiO2 coating by atmospheric pressure MOCVD in a conveyor belt furnace for industrial applications, CHEM VAPOR, 5(2), 1999, pp. 73
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
CHEMICAL VAPOR DEPOSITION
ISSN journal
09481907 → ACNP
Volume
5
Issue
2
Year of publication
1999
Database
ISI
SICI code
0948-1907(199903)5:2<73:TCBAPM>2.0.ZU;2-5
Abstract
An inexpensive, high-volume CVD production system for a protective oxide co ating is described. The critical point with such a process is the precursor mixer and injector head? and an original and simple structure has been des igned (see Figure). Uniform, adherent, good quality TiO2 anatase films have been obtained and their functionality at high temperatures has been tested .