Jw. Fowler et al., A group-technology-coded literature review of semiconductor manufacturing operations publications: The MASMLAB Bibliography Web site, IEEE SEMIC, 12(2), 1999, pp. 259-263
Modeling and simulation of semiconductor manufacturing operations is a rapi
dly developing area with a supporting published literature that is explodin
g in size. In this paper, we present a study of that literature which we us
e to build a searchable database that is implemented as an Internet site (h
ttp://www.eas.asu.edurmasmlab/Biblio.html). The semiconductor manufacturing
modeling community needs a focused, electronically accessible, and better
structured bibliographic resource. To accomplish this, we have developed a
database that uses a group technology coding of articles based upon index s
earching. The importance of this database is not only in collecting many pe
rtinent articles for users, but also in classifying them. The objectives of
this site are to be useful to industrial practitioners, faculty members, s
tudents, and software developers, and to be widely available, economically
feasible, and easily managed, The user can search the database by problem t
ype, measurement metric, modeling technique, organization decision level, p
ublication year, and publication type to find desirable article lists withi
n a short time. The Modeling and Analysis of Semiconductor Manufacturing La
boratory (MASMLAB) database currently contains 559 coded articles relevant
to the modeling and analysis of semiconductor manufacturing.