A group-technology-coded literature review of semiconductor manufacturing operations publications: The MASMLAB Bibliography Web site

Modeling and simulation of semiconductor manufacturing operations is a rapi dly developing area with a supporting published literature that is explodin g in size. In this paper, we present a study of that literature which we us e to build a searchable database that is implemented as an Internet site (h ttp://www.eas.asu.edurmasmlab/Biblio.html). The semiconductor manufacturing modeling community needs a focused, electronically accessible, and better structured bibliographic resource. To accomplish this, we have developed a database that uses a group technology coding of articles based upon index s earching. The importance of this database is not only in collecting many pe rtinent articles for users, but also in classifying them. The objectives of this site are to be useful to industrial practitioners, faculty members, s tudents, and software developers, and to be widely available, economically feasible, and easily managed, The user can search the database by problem t ype, measurement metric, modeling technique, organization decision level, p ublication year, and publication type to find desirable article lists withi n a short time. The Modeling and Analysis of Semiconductor Manufacturing La boratory (MASMLAB) database currently contains 559 coded articles relevant to the modeling and analysis of semiconductor manufacturing.