We have conducted a detailed in situ study of phase formation in Zr-Fe meta
llic multilayers using irradiation and thermal annealing. Metallic multilay
ers with near equiatomic and Fe-rich overall compositions and with repetiti
on thicknesses ranging from 7.4 to 33 nm were either irradiated with 300 ke
V Kr ions at various temperatures (from 17 to 623 K) or thermally annealed
at 773 K while being observed in situ. The kinetics of multilayer reaction
were monitored by following the diffraction patterns. For near equiatomic s
amples, irradiation causes complete amorphization. The dose to amorphizatio
n increases in proportion to the square of the wavelength, indicating a pro
cess controlled by atomic transport. Amorphization was also achieved by 900
keV electron irradiation at 25 K showing that displacement cascades are no
t required. The critical dose to amorphization was independent of temperatu
re below room temperature and decreased above room temperature. The activat
ion energy for this second process is 0.17 eV. For the temperature range st
udied, diffraction from Zr disappears first, indicating that amorphization
takes place in the Zr layer by atomic transport of Fe from the Fe layers. T
hese results are consistent with a combination of simple ballistic mixing a
t low temperature and either simple diffusion or radiation-enhanced diffusi
on at higher temperatures. Thermal annealing of the equiatomic samples at 7
73 K produced the same reaction products with slower kinetics. Ion irradiat
ion of Fe-rich samples did not cause complete amorphization and intermetall
ic compounds Zr3Fe and ZrFe2 were observed in longer wavelength samples. Am
orphization of Fe-rich samples was more sluggish, likely because there was
competition with formation of other phases. The reaction kinetics were not
proportional to square of wavelength for Fe-rich samples, indicating a proc
ess that depends on more than atomic transport. Thermal annealing at 773 K
of a long wavelength, 57% Fe sample resulted in intermetallic compounds Zr3
Fe and ZrFe2 which amorphized during subsequent irradiation. The ease of am
orphization of equiatomic samples relative to Fe-rich samples can be explai
ned by a narrower, single minimum free energy curve for the amorphous phase
. (C) 1999 American Institute of Physics. [S0021-8979(99)01610-2].