Large-area quartz glass microlens array fabricated by ion beam etching forfocal plane detectors

A large-area quartz glass refractive microlens array mounted on a large-are a focal-plane detecting architecture was fabricated using a multiple-proces s, including photolithography, heat treatment, and argon ion beam etching. The experimental measurements show that the optical filling factor of the f ocal-plane dtectors with refractive microlens array is more than 95% (for s quare-based arch microlens) and 70% (for spherical microlens), respectively , the focal length of the square-based arch microlens and spherical microle ns is about 90 mu m and 80 mu m, respectively. Both the scanning electron m icroscope and the surface style measurement were used to determine the dime nsions and the surface morphology of the microlens fabricated. The techniqu es utilized can be applied to fabricate microlens array of larger area.