Preparation for TEM of layered samples with fragile microstructure and weak layer interface

The objective of this work was to prepare for transmission electron microsc opy (TEM) a layered structure of materials with fragile microstructure. The samples consisted of two layers of different materials, silicon nitride an d borosilicate glass, loosely bonded together. The low strength of the samp le resulted in fragmentation during more conventional preparation. However, it was possible to prepare the fragments by mounting them in a titanium sp ecimen carrier with aluminium strips as support. After grinding and polishi ng, a technique of low-angle ion milling was used to obtain electron beam t ransparent areas at the nitride/glass interface. (C) 1999 Wiley-Liss, Inc.