Fabrication of high-spatial-frequency gratings through computer-generated near-field holography

We demonstrate an innovative method for fabrication of high-spatial-frequen cy grating structures. This technique makes use of the near-field diffracti on patterns from computer-generated phase holograms for lithographic fabric ation of grating structures with periods that are one half that of the phas e hologram mask. Linear, rectilinear, and circular gratings were fabricated with this technique. Experimental results from gratings with periods to 0. 5 mu m and feature sizes to similar to 0.2 mu m are presented. (C) 1999 Opt ical Society of America.