Using (110) NdGaO3 wafers as the lattice matched substrates, PbTiO3 th
in films have been epitaxially grown by metal-organic chemical vapor d
eposition under reduced pressure. Highly resolved Raman spectra of the
thin films have been recorded by a grazing-angle scattering technique
. The E(1TO) mode of the epitaxial film has been observed to have a 7-
cm(-1) upward shift compared to the bulk PbTiO3 single crystal, which
is different from the soft-mode behavior observed in PbTiO3 ultrafine
powder and polycrystalline thin films. This transverse optical mode up
shift phenomenon is attributable to the residual in-plane compressive
stress in the epitaxial thin film caused by the film-substrate interac
tion. This phonon-mode-shift phenomenon provides a method to estimate
the residual stresses existing in a ferroelectric thin film.