Noncontact measurement of etalon spacing using a retroreflection technique

Authors
Thomas, PJ Mani, R Khalil, N
Citation
Pj. Thomas et al., Noncontact measurement of etalon spacing using a retroreflection technique, REV SCI INS, 70(5), 1999, pp. 2225-2229
Citations number
11
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
REVIEW OF SCIENTIFIC INSTRUMENTS
ISSN journal
00346748 → ACNP
Volume
70
Issue
5
Year of publication
1999
Pages
2225 - 2229
Database
ISI
SICI code
0034-6748(199905)70:5<2225:NMOESU>2.0.ZU;2-Z
Abstract
A novel technique is described for the noncontact determination of the spac ings of solid and air-gap etalons of low reflectivity by the retroreflectio n of a He-Ne laser beam. Gaps as small as 50 mu m were measured with a prec ision of better than +/-1 mu m. Typical measurement accuracy is better than 2%. (C) 1999 American Institute of Physics. [S0034-6748(99)02005-5].