The paper deals with the interpretation of the results obtained from the de
pth profile measurements based on sputter analytical techniques for samples
that were previously subjected by ion bombardment. It is shown that the ch
anges in the kinetics of surface composition observed at the initial stages
of depth profiling may not correspond to the real composition distribution
for the near-surface region, but may be initiated by unbalanced fluxes bet
ween the sputtered atoms from the surface and mass transport in the near-su
rface layer taking place under concentration gradients formed by preferenti
al sputtering. The influence of temperature that affects the process of seg
regation is considered and a possible segregation mechanism based on radiat
ion induced phonons is investigated. (C) 1999 Elsevier Science Ltd. All rig
hts reserved.