Refractive prismatic and off-axis micro-optical elements have been fabricat
ed in gallium phosphide by mass-transport smoothing of multistep and binary
preforms, respectively. A total optical efficiency of greater than 94% was
measured for the prism, while diffraction-limited collimation and steering
were demonstrated with the off-axis lens. A qualitative discussion of poss
ible errors in binary preform etching and their effects on the surface figu
re is also included. (C) 1999 Optical Society of America.