F. Nikolajeff et al., Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials, APPL OPTICS, 38(14), 1999, pp. 3030-3038
Micromirrors were fabricated in gallium phosphide by mass transport to prov
ide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL'
s). The concave mirrors were used in an external-cavity configuration to pr
ovide spatial filtering in the far field. Single-mode cw lasing was demonst
rated in 15-mu m-diameter VCSEL's with currents as high as 6 times threshol
d. The fabrication process was extended to micromirrors in gallium arsenide
by use of a replication and dry-etch transfer process. (C) 1999 Optical So
ciety of America.