Doping of diamond

Diamond is a wide-bandgap semiconductor with unsurpassed physical and chemi cal properties. When doped, semiconducting diamond can lead to the realizat ion of electronic and optoelectronic devices with exceptional properties. D iamond can now be doped p-type, with boron, both during CVD diamond film gr owth and by ion-implantation, and n-type with phosphorus during CVD growth. This paper reviews the current status of diamond doping and describes the electronic properties of the doped layers. Some potential applications of d oped semiconducting diamond are described. (C) 1999 Elsevier Science Ltd Al l rights reserved.