InP-based micro-opto-electro mechanical systems (MOEMS)

The potential application of InP and related compound semiconductors for th e realisation of novel microsystems is explored. Monolithic integration of optoelectronic devices with micro-electro-mechanical transducers are expect ed to develop a new and low cost technology for the implementation of speci fic microsensors and microactuators with a higher sensitivity and a wider r ange of environmental interaction as compared with other existing MEMS. The InP-based microtechnology has been developed, which includes the design of microsystems, epitaxial growth of heterostructures, selective micromachini ng, electro-optomechanical characterisations.