An angle-based position detection method for precision machines

This paper presents a new multiple-degree-of-freedom position detection met hod. The proposed method uses a position detection unit consisting of three two-dimensional angle sensors and a two-dimensional angle grid. The displa cements in the x and y directions in addition to the rolling, pitching and yawing of the moving object can be determined from the outputs of the angle sensors. The angle grid and angle sensors are calibrated using a self-cali bration method to assure accurate position detection. In addition, simulati on results confirming the feasibility of the new method are presented.