Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp

We report on the fabrication of diffraction gratings in photosensitive sol- gel thin films by direct contact printing using a UV-mercury lamp. Titanium amplitude masks were used to replicate diffraction gratings into photosens itive sol-gel films by contact printing with an incoherent UV-light source. Gratings with 1-mu m period were fabricated in sol-gel films. The diffract ion efficiencies of each diffracted order were measured and compared to the oretical values. The demonstrated process of contact printing using a regul ar UV-light source in the optically compatible sol-gel material has potenti al for large-scale fabrication of submicrometer gratings at very low cost. (C) 1999 Elsevier Science B.V. All rights reserved.