Quadrupole secondary ion mass spectrometer for simultaneous detection of positive and negative ions

The purpose of this study was to design a quadrupole secondary ion mass spe ctrometer for simultaneous detection of both positive and negative ions of different mass, An original setup based on a quadrupole electrostatic defle ctor configuration that allows energy and spatial separation of all types o f secondary ions was proposed. The device was modeled using the SIMION 3D p rogram before building the prototype, Trajectory and acceptance calculation s were provided. Positive and negative secondary ion mass spectra for molyb denum test samples were obtained. Copyright (C) 1999 John Wiley & Sons Ltd.