Fabrication of arrays of Schottky diodes using microtransfer molding

This paper describes the application of microtransfer molding-a representat ive soft lithographic technique-to the fabrication of simple Schottky diode s on silicon. The fabrication of a diode involved two microtransfer molding steps. The current-voltage responses of these diodes displayed characteris tic nonlinear diode behavior. The yield of pattern transfer was 95% and the yield of functional diodes was 90%. Future improvements and potential indu stry application is proposed. (C) 1999 Elsevier Science S.A. All rights res erved.