Cm. Chiu et Yh. Chang, The influence of microstructure and deposition methods on CO gas sensing properties of La0.8Sr0.2Co1-xNixO3-delta perovskite films, SENS ACTU-B, 54(3), 1999, pp. 236-242
The sensing characteristics to CO of the La0.8Sr0.2Co1-xNixO3-delta perovsk
ite sensor films were strongly dependent on the deposition methods. By the
dipping method, the maximum sensitivity was obtained on the film treated at
800 degrees C for 30 min. By the RF sputtering method, only the heat treat
ed film showed response to CO. The maximum sensitivity was obtained in the
film treated at 700 degrees C for 5 h. The sensitivity variation was affect
ed by their grain morphologies. It is found that more porous films exhibit
a larger sensitivity. Comparing these two techniques, the film made by the
dipping method showed both larger sensitivity and lower operating temperatu
re (180 degrees C). This phenomenon can be attributed to the larger surface
reaction area on sensitivity. In addition, different binding energy states
of oxygen can also influence the sensing properties to CO. (C) 1999 Elsevi
er Science S.A. All rights reserved.