Effect of surface reactivity on the nucleation of hydrocarbon thin films through molecular-cluster beam deposition

The effect of surface reactivity on thin film nucleation through cluster-su rface collisions is examined using molecular dynamics simulations with a we ll-known reactive empirical-bond order potential for hydrocarbons. It has p reviously been shown through experiments that strongly adhering polymer thi n films can be generated through the impact of organic clusters with mica, diamond, or glass surfaces. In this study, molecular clusters of ethylene a nd acetylene are impacted at hyperthermal velocities of about 1.3 keV per d uster against activated bare 1 x 1 diamond (111), reconstructed 2x1 diamond (111), and hydrogen-terminated diamond (111) surfaces. As a result of the collisions, the cluster molecules react with each other and the surface nuc leating thin hydrocarbon films. The effect of surface and molecular reactiv ity on thin film nucleation and structure is discussed. (C) 1999 Elsevier S cience B.V. All rights reserved.