A STRUCTURAL INVESTIGATION OF HIGH-QUALITY EPITAXIAL PB(ZR,TI)O-3 THIN-FILMS

Authors
CAO LX XU Y ZHAO BR GUO LP LI L XU B ZHANG YZ CHEN H ZHU AJ MAI ZH ZHAO JH FU YF LI XJ
Citation
Lx. Cao et al., A STRUCTURAL INVESTIGATION OF HIGH-QUALITY EPITAXIAL PB(ZR,TI)O-3 THIN-FILMS, Journal of physics. D, Applied physics, 30(10), 1997, pp. 1455-1458
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of physics. D, Applied physics → ACNP
ISSN journal
00223727
Volume
30
Issue
10
Year of publication
1997
Pages
1455 - 1458
Database
ISI
SICI code
0022-3727(1997)30:10<1455:ASIOHE>2.0.ZU;2-L
Abstract
The Pb(Zr0.53Ti0.47)O-3 (PZT 53/47) and Pb(Zr0.20Ti0.80)O-3 (PZT 20/80 ) films deposited on (100)SrTiO3 substrates by RF magnetron sputtering are single-phase epitaxial films. In order to prevent large thermal s tresses being induced in the films during the preparation process, the PZT films were cooled slowly through the Curie temperature. Scanning electron microscopy (SEM) showed that the PZT 53/47 film had a pyramid structure on its surface, whereas the PZT 20/80 film had a smooth sur face without any observable features. Transmission electron microscopy (TEM) observations showed similar features: the PZT 53/47 film had a coarse columnar structure, whereas the PZT 20/80 film had a fine cryst alline structure; this is due to the better lattice matching in the la tter.