A self-consistent fluid simulation of an inductively coupled plasma reactor

Authors
Bose, D Govindan, TR Meyyappan, M
Citation
D. Bose et al., A self-consistent fluid simulation of an inductively coupled plasma reactor, IEEE PLAS S, 27(1), 1999, pp. 54-55
Citations number
6
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
27
Issue
1
Year of publication
1999
Pages
54 - 55
Database
ISI
SICI code
0093-3813(199902)27:1<54:ASFSOA>2.0.ZU;2-O
Abstract
We have developed a self consistent fluid model that couples plasma dynamic s, Navier-Stokes equations, and Maxwell's equations to analyze inductively coupled plasma reactors used in semiconductor processing, Two dimensional s imulations of an N-2 plasma have been performed and found to agree well wit h experimental data, Images of plasma density, gas and ion traces are provi ded.