Two-dimensional mapping of electron distribution functions in low pressureICP

Authors
Heil, B Kortshagen, U
Citation
B. Heil et U. Kortshagen, Two-dimensional mapping of electron distribution functions in low pressureICP, IEEE PLAS S, 27(1), 1999, pp. 56-57
Citations number
5
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
27
Issue
1
Year of publication
1999
Pages
56 - 57
Database
ISI
SICI code
0093-3813(199902)27:1<56:TMOEDF>2.0.ZU;2-D
Abstract
Two-dimensionally resolved Langmuir probe measurements of electron distribu tion functions (EDF) have been performed in a low pressure inductively coup led plasma. The measurements confirm nonlocal behavior of the EDF at low pr essures while deviations from the nonlocality of the EDF are observed at hi gher pressures, The experimental results are discussed in terms of the ener gy relaxation length of the electrons.