Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma

Authors
Economou, DJ Wise, RS Kubota, AA
Citation
Dj. Economou et al., Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma, IEEE PLAS S, 27(1), 1999, pp. 60-61
Citations number
10
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
27
Issue
1
Year of publication
1999
Pages
60 - 61
Database
ISI
SICI code
0093-3813(199902)27:1<60:PFAMSS>2.0.ZU;2-E
Abstract
Hysteresis and multiple steady states have been observed in a low pressure inductively coupled plasma in chlorine gas. A bowl-shaped bright structure with sharply delineated edges (plasmoid) was found to form under the planar coil, A different plasma state with rather diffuse emission of lower inten sity was also observed under the same operating conditions.