Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

Authors
Czarnetzki, U Hebner, GA Luggenholscher, D Dobele, HF Riley, ME
Citation
U. Czarnetzki et al., Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge, IEEE PLAS S, 27(1), 1999, pp. 70-71
Citations number
3
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
27
Issue
1
Year of publication
1999
Pages
70 - 71
Database
ISI
SICI code
0093-3813(199902)27:1<70:PSEFSA>2.0.ZU;2-6
Abstract
The magnitude of the sheath electric field above a grooved electrode was me asured using a novel, two color, laser induced fluorescence technique. Spat ially resolved electric fields in the sheath region were determined by mapp ing the field induced Stark splitting of the n = 14 level in atomic hydroge n. Measured electric field values are in good agreement with calculated val ues.