Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy

Authors
Mahony, CMO Graham, WG
Citation
Cmo. Mahony et Wg. Graham, Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy, IEEE PLAS S, 27(1), 1999, pp. 72-73
Citations number
5
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
27
Issue
1
Year of publication
1999
Pages
72 - 73
Database
ISI
SICI code
0093-3813(199902)27:1<72:HMICCR>2.0.ZU;2-0
Abstract
It is demonstrated that spatio-temporally resolved emission studies of a ca pacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharg es.