Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation

Authors
Minea, TM Bretagne, J Gousset, G
Citation
Tm. Minea et al., Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation, IEEE PLAS S, 27(1), 1999, pp. 94-95
Citations number
6
Categorie Soggetti
Physics
Journal title
IEEE TRANSACTIONS ON PLASMA SCIENCE
ISSN journal
00933813 → ACNP
Volume
27
Issue
1
Year of publication
1999
Pages
94 - 95
Database
ISI
SICI code
0093-3813(199902)27:1<94:EOTTAC>2.0.ZU;2-B
Abstract
A two-dimensional (2-D) time resolved PIC-MCC simulation implemented on a p arallel machine is developed for the modeling of an RF planar magnetron dis charge. Preliminary results of the self-consistent plasma model are present ed. Instantaneous electron and ion 2-D density distributions are reported.