This paper presents the results of grinding experiments and the characteris
ation of subsurface damage of different advanced ceramics due to the grindi
ng process. In order to understand the influence on material removal and su
rface integrity of the mechanical and thermal effects, different investigat
ions were done. To change the thermomechanical effects of the grinding proc
ess, the machine settings were changed successively as well as the grinding
wheels (diamond grain size). Grinding experiments with heated workpieces w
ere performed in order to change the material properties. Besides conventio
nal X-ray measurements, the results of stress gradients will be discussed.