We report on the performance of AlGaN/GaN MODFETs grown by MBE. A record va
lue of 410 V maximum drain voltage was measured for devices with current de
nsities of 200 mA/mm. From the dependence of breakdown voltage with gate-dr
ain separation a breakdown held of approximate to 1 MV/cm is estimated. (C)
1999 Elsevier Science B.V. All rights reserved.