Characterisation of an RF atomic nitrogen plasma source

Authors
Voulot, D McCullough, RW Thompson, WR Burns, D Geddes, J Cosimini, GJ Nelson, E Chow, PP Klaassen, J
Citation
D. Voulot et al., Characterisation of an RF atomic nitrogen plasma source, J CRYST GR, 202, 1999, pp. 399-401
Citations number
2
Categorie Soggetti
Physical Chemistry/Chemical Physics
Journal title
JOURNAL OF CRYSTAL GROWTH
ISSN journal
00220248 → ACNP
Volume
202
Year of publication
1999
Pages
399 - 401
Database
ISI
SICI code
0022-0248(199905)202:<399:COARAN>2.0.ZU;2-J
Abstract
The dissociation fraction and atomic nitrogen flux from an SVTA radio frequ ency atomic nitrogen source designed for nitrogen doping by MBE have been m easured absolutely. Their dependence on source power and pressure condition s has been investigated. Dissociation fractions of up to 40% and atomic flu xes of up to 8 x 10(17) s(-1) were obtained. (C) 1999 Elsevier Science B.V. All rights reserved.