Molecular beam epitaxy has been used to grow epitaxial layers of different
CuInxSey phases on (111) oriented silicon substrates. Rutherford backscatte
ring channeling yields of 7-11% and X-ray rocking curve linewidths of 900 a
rcsec measured for 600 nm thick layers are the indication of good crystal q
uality. The structural properties of the interface between the layers and t
he substrate were studied with transmission electron microscopy. Because of
interdiffusion of Cu, Se and Si an about 10 nm thick In-free interfacial l
ayer is formed. (C) 1999 Elsevier Science B.V. All rights reserved.