We studied the volume distributions of dislocation-free InAs/GaAs self-asse
mbled quantum dots obtained by Stranski-Krastanow mode of molecular beam ep
itaxy, with and without in situ annealing, The same scaling function was ob
tained over a wide range of dot densities. The scaling function indicated t
hat the cluster size fluctuation normalized by the average size is constant
for all the quantum dot densities we studied. The resemblance of the scali
ng function to that of the submonolayer homoepitaxial growth implies that t
he strain is not the essential factor determining the cluster size distribu
tion of quantum dots. (C) 1999 Elsevier Science B.V. All rights reserved.