A morphology study of magnetron-sputtered Al films by atomic force microscopy

Citation
Y. Sun et al., A morphology study of magnetron-sputtered Al films by atomic force microscopy, J MAT SCI L, 18(5), 1999, pp. 407-409
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE LETTERS
ISSN journal
02618028 → ACNP
Volume
18
Issue
5
Year of publication
1999
Pages
407 - 409
Database
ISI
SICI code
0261-8028(19990301)18:5<407:AMSOMA>2.0.ZU;2-E