Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y2O3-stabilized ZrO2(100) and (110)

We have studied the (100) and (110) surfaces of yttria-stabilized cubic ZrO 2 using Auger electron spectroscopy, low energy electron diffraction (LEED) , direct recoil spectroscopy, mass spectroscopy of recoiled ions (MSRI), an d secondary ion mass spectroscopy (SIMS). The concentration of yttrium at t he surface was weakly influenced by the surface structure under the experim ental conditions investigated. Both MSRI and SIMS indicated a more enhanced yttrium signal than zirconium signal at the surface compared to the respec tive bulk concentrations. The surfaces were not very well ordered as indica ted by LEED. The yttria-stabilized cubic ZrO2 single crystal surfaces may n ot be a suitable model material for pure phase ZrO2 surfaces due to signifi cant yttria concentrations at the surface. (C) 1999 American Vacuum Society . [S0734-2101(99)02603-2].