L. Maya et al., Optical and mechanical consequences of microstructural alteration of alphaplatinum dioxide films, J VAC SCI A, 17(3), 1999, pp. 1036-1039
The microstructure of sputtered alpha platinum dioxide consists of a porous
random assembly of platelets. A sweeping motion with very light pressure,
by either a sharp or blunt object, leaves a track clearly visible, in refle
cted light, that stands in contrast to the opaque brown background of the i
ntact film. Microstructural analysis utilizing atomic force microscopy reve
aled a flattening of the platelets in the affected areas. High reflectivity
of the flattened portion is apparently a consequence of the relatively hig
h refractive index of this material. X-ray diffraction by the flattened pla
telets shows a significant enhancement of the intensity of the 001 reflecti
on corresponding to the alignment of the crystals parallel to the substrate
. The work required to flatten the platelets along a microscopic track was
deduced from sensitive friction force measurements. Electrical resistivity
of the flattened film is moderately lower than that of the intact film. The
phenomenon described here might be of importance for data storage or for a
lignment in lithographic reproduction of multilevel electronic circuits. (C
) 1999 American Vacuum Society. [S0734-2101(99)04903-9].