The atomic force microscope (AFM), with its ability to image and modify sur
faces on the nanometer scale, offers the potential for simple, compact, hig
h-density data-storage devices. At the heart of the technique is a microfab
ricated cantilever with a sharp tip on the end. Using modern micromachining
techniques, it is possible to batch fabricate cantilevers with tips that a
ir sharp on the scale of 100 Angstrom. We have pursued a particular AFM sto
rage scheme based on mechanical readback of topographic data using high fre
quency piezoresistive silicon cantilevers. Areal densities of 65 Gbit/in(2)
have been demonstrated, with readback rates greater than 10 Mbit/s. Nanore
plication techniques have been used to produce read-only disks. In addition
, a write-once scheme Mns developed that rises integrated heating elements
on the cantilevers in order to perform thermomechanical writing on a polyme
r substrate. Considerable progress has been made in addressing critical iss
ues such as data rate, reliability, and practical implementation, hilt sign
ificant challenges still remain, both in the technology and in finding the
most suitable applications.