The composition of a-Si1-xCx:H films, deposited by magnetron sputtering, wa
s measured by AES (Auger Electron Spectroscopy), RES (Rutherford Backscatte
ring Spectrometry) using both, protons and alpha-particles, ERDA (Elastic R
ecoil Detection Analysis) and FTIR spectroscopy. The results obtained by al
l three methods show agreement in C-C/C-Si ratio within the experimental er
ror. However, the AES somewhat underestimates the silicon concentrations, w
hich is discussed as a consequence of chemical bonding and matrix effects.
The hydrogen concentrations obtained by ERDA are typically about 30% higher
than those estimated by FTIR, possibly due to the presence of non-bonded h
ydrogen in the film. (C) 1999 Elsevier Science B.V. All rights reserved.